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Plasma-Surface Interaction Data Set 417

Sputtering of D+ on Tb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Tb(pc) at 300 K

angle = 0.0 deg E /eV P
92.150.0
106.30.0001487
122.60.0005165
141.40.001162
163.00.002162
188.00.003582
216.90.005445
250.10.007709
288.50.01026
332.70.01294
383.70.01558
442.50.01804
510.40.02025
588.60.02217
678.90.0238
783.00.02517
903.00.02631
1041.00.02724
1201.00.02801
1385.00.02861
1598.00.02908
1843.00.02941
2125.00.02962
2451.00.02971
2827.00.02969
3260.00.02955
3760.00.02929
4336.00.02893
5001.00.02846
5768.00.02788
6652.00.0272
7672.00.02644
8849.00.02559
10210.00.02467
11770.00.02368
13570.00.02264
15660.00.02156
18060.00.02045
20820.00.01933
24020.00.0182
27700.00.01707
31950.00.01596
36840.00.01487
42490.00.01382
49010.00.0128
56520.00.01182
65190.00.01089
75180.00.01
86710.00.009166

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 92.15 – 100000