{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tb", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Tb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2514, "q": 0.0764, "mu": 1.467, "epsilonL": 0.0001193, "Eth": 92.15}, "E_min": 92.15, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
92.15	0.0	
106.3	0.0001487	
122.6	0.0005165	
141.4	0.001162	
163.0	0.002162	
188.0	0.003582	
216.9	0.005445	
250.1	0.007709	
288.5	0.01026	
332.7	0.01294	
383.7	0.01558	
442.5	0.01804	
510.4	0.02025	
588.6	0.02217	
678.9	0.0238	
783.0	0.02517	
903.0	0.02631	
1041.0	0.02724	
1201.0	0.02801	
1385.0	0.02861	
1598.0	0.02908	
1843.0	0.02941	
2125.0	0.02962	
2451.0	0.02971	
2827.0	0.02969	
3260.0	0.02955	
3760.0	0.02929	
4336.0	0.02893	
5001.0	0.02846	
5768.0	0.02788	
6652.0	0.0272	
7672.0	0.02644	
8849.0	0.02559	
10210.0	0.02467	
11770.0	0.02368	
13570.0	0.02264	
15660.0	0.02156	
18060.0	0.02045	
20820.0	0.01933	
24020.0	0.0182	
27700.0	0.01707	
31950.0	0.01596	
36840.0	0.01487	
42490.0	0.01382	
49010.0	0.0128	
56520.0	0.01182	
65190.0	0.01089	
75180.0	0.01	
86710.0	0.009166	
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