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Plasma-Surface Interaction Data Set 416

Sputtering of H+ on Tb(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Tb(pc) at 300 K

angle = 0.0 deg E /eV P
180.81.866e-26
205.74.981e-05
234.00.0001666
266.20.0003641
302.80.000663
344.40.001082
391.80.001632
445.70.00231
507.00.003093
576.80.003941
656.10.004807
746.40.005642
849.00.006409
965.80.007084
1099.00.007659
1250.00.008134
1422.00.008516
1617.00.008816
1840.00.009042
2093.00.009204
2381.00.00931
2708.00.009367
3081.00.009378
3505.00.009349
3987.00.009283
4535.00.009181
5159.00.009047
5869.00.008883
6676.00.008691
7595.00.008473
8639.00.008232
9828.00.007971
11180.00.007691
12720.00.007396
14470.00.007089
16460.00.006773
18720.00.00645
21300.00.006124
24230.00.005797
27560.00.005471
31350.00.005149
35660.00.004833
40570.00.004525
46150.00.004226
52500.00.003937
59720.00.00366
67930.00.003395
77280.00.003142
87910.00.002903

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 180.8 – 100000