{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Tb", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of H+ on Tb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4151, "q": 0.0245, "mu": 1.445, "epsilonL": 0.00012, "Eth": 180.8}, "E_min": 180.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
180.8	1.866e-26	
205.7	4.981e-05	
234.0	0.0001666	
266.2	0.0003641	
302.8	0.000663	
344.4	0.001082	
391.8	0.001632	
445.7	0.00231	
507.0	0.003093	
576.8	0.003941	
656.1	0.004807	
746.4	0.005642	
849.0	0.006409	
965.8	0.007084	
1099.0	0.007659	
1250.0	0.008134	
1422.0	0.008516	
1617.0	0.008816	
1840.0	0.009042	
2093.0	0.009204	
2381.0	0.00931	
2708.0	0.009367	
3081.0	0.009378	
3505.0	0.009349	
3987.0	0.009283	
4535.0	0.009181	
5159.0	0.009047	
5869.0	0.008883	
6676.0	0.008691	
7595.0	0.008473	
8639.0	0.008232	
9828.0	0.007971	
11180.0	0.007691	
12720.0	0.007396	
14470.0	0.007089	
16460.0	0.006773	
18720.0	0.00645	
21300.0	0.006124	
24230.0	0.005797	
27560.0	0.005471	
31350.0	0.005149	
35660.0	0.004833	
40570.0	0.004525	
46150.0	0.004226	
52500.0	0.003937	
59720.0	0.00366	
67930.0	0.003395	
77280.0	0.003142	
87910.0	0.002903	
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