pwiDB

Plasma-Surface Interaction Data Set 413

Sputtering of Ar⁺ on Te(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Te(pc) at 300 K

angle = 0.0 deg	E /eV	P
	7.438	0.0
	9.03	0.0001259
	10.96	0.0009256
	13.31	0.003532
	16.16	0.0102
	19.62	0.02482
	23.82	0.05273
	28.92	0.09863
	35.11	0.1629
	42.63	0.2401
	51.76	0.3226
	62.84	0.4051
	76.3	0.4862
	92.63	0.5669
	112.5	0.6492
	136.5	0.7349
	165.8	0.8254
	201.3	0.9221
	244.4	1.026
	296.7	1.137
	360.2	1.256
	437.3	1.384
	531.0	1.52
	644.7	1.665
	782.7	1.818
	950.3	1.979
	1154.0	2.148
	1401.0	2.323
	1701.0	2.505
	2065.0	2.692
	2507.0	2.884
	3044.0	3.078
	3695.0	3.274
	4486.0	3.469
	5447.0	3.663
	6613.0	3.853
	8029.0	4.037
	9748.0	4.213
	11840.0	4.379
	14370.0	4.533
	17450.0	4.671
	21180.0	4.791
	25720.0	4.891
	31220.0	4.968
	37910.0	5.019
	46020.0	5.043
	55880.0	5.036
	67840.0	4.998
	82370.0	4.928

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0993
q = 12.9
mu = 2.272
epsilonL = 5.804e-06
Eth = 7.438

Fit range

E = 7.438 – 100000