{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Te", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ar+ on Te(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0993, "q": 12.9, "mu": 2.272, "epsilonL": 5.804e-06, "Eth": 7.438}, "E_min": 7.438, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
7.438	0.0	
9.03	0.0001259	
10.96	0.0009256	
13.31	0.003532	
16.16	0.0102	
19.62	0.02482	
23.82	0.05273	
28.92	0.09863	
35.11	0.1629	
42.63	0.2401	
51.76	0.3226	
62.84	0.4051	
76.3	0.4862	
92.63	0.5669	
112.5	0.6492	
136.5	0.7349	
165.8	0.8254	
201.3	0.9221	
244.4	1.026	
296.7	1.137	
360.2	1.256	
437.3	1.384	
531.0	1.52	
644.7	1.665	
782.7	1.818	
950.3	1.979	
1154.0	2.148	
1401.0	2.323	
1701.0	2.505	
2065.0	2.692	
2507.0	2.884	
3044.0	3.078	
3695.0	3.274	
4486.0	3.469	
5447.0	3.663	
6613.0	3.853	
8029.0	4.037	
9748.0	4.213	
11840.0	4.379	
14370.0	4.533	
17450.0	4.671	
21180.0	4.791	
25720.0	4.891	
31220.0	4.968	
37910.0	5.019	
46020.0	5.043	
55880.0	5.036	
67840.0	4.998	
82370.0	4.928	
-----