pwiDB

Plasma-Surface Interaction Data Set 412

Sputtering of Kr⁺ on Sb(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Sb(pc) at 300 K

angle = 0.0 deg	E /eV	P
	13.57	0.0
	16.28	0.0001374
	19.52	0.0008517
	23.41	0.002896
	28.07	0.007674
	33.67	0.0176
	40.38	0.0364
	48.43	0.06896
	58.08	0.1201
	69.65	0.1923
	83.53	0.2837
	100.2	0.3888
	120.1	0.501
	144.1	0.616
	172.8	0.732
	207.3	0.8497
	248.6	0.9705
	298.1	1.096
	357.5	1.229
	428.7	1.37
	514.2	1.521
	616.7	1.682
	739.6	1.855
	887.0	2.039
	1064.0	2.236
	1276.0	2.446
	1530.0	2.669
	1835.0	2.905
	2201.0	3.153
	2639.0	3.413
	3165.0	3.684
	3796.0	3.966
	4552.0	4.258
	5460.0	4.557
	6548.0	4.863
	7853.0	5.175
	9418.0	5.489
	11290.0	5.803
	13550.0	6.117
	16250.0	6.426
	19480.0	6.728
	23370.0	7.02
	28020.0	7.299
	33610.0	7.562
	40310.0	7.805
	48340.0	8.025
	57970.0	8.218
	69530.0	8.381
	83380.0	8.509

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1171
q = 22.13
mu = 2.089
epsilonL = 2.114e-06
Eth = 13.57

Fit range

E = 13.57 – 100000