{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sb", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Sb(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1171, "q": 22.13, "mu": 2.089, "epsilonL": 2.114e-06, "Eth": 13.57}, "E_min": 13.57, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.57	0.0	
16.28	0.0001374	
19.52	0.0008517	
23.41	0.002896	
28.07	0.007674	
33.67	0.0176	
40.38	0.0364	
48.43	0.06896	
58.08	0.1201	
69.65	0.1923	
83.53	0.2837	
100.2	0.3888	
120.1	0.501	
144.1	0.616	
172.8	0.732	
207.3	0.8497	
248.6	0.9705	
298.1	1.096	
357.5	1.229	
428.7	1.37	
514.2	1.521	
616.7	1.682	
739.6	1.855	
887.0	2.039	
1064.0	2.236	
1276.0	2.446	
1530.0	2.669	
1835.0	2.905	
2201.0	3.153	
2639.0	3.413	
3165.0	3.684	
3796.0	3.966	
4552.0	4.258	
5460.0	4.557	
6548.0	4.863	
7853.0	5.175	
9418.0	5.489	
11290.0	5.803	
13550.0	6.117	
16250.0	6.426	
19480.0	6.728	
23370.0	7.02	
28020.0	7.299	
33610.0	7.562	
40310.0	7.805	
48340.0	8.025	
57970.0	8.218	
69530.0	8.381	
83380.0	8.509	
-----