pwiDB

Plasma-Surface Interaction Data Set 411

Sputtering of Xe⁺ on Sn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Sn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	14.26	0.0
	17.09	1.619e-06
	20.47	2.439e-05
	24.53	0.0001469
	29.39	0.0006102
	35.21	0.002069
	42.18	0.006142
	50.54	0.01646
	60.55	0.03994
	72.54	0.08654
	86.91	0.1633
	104.1	0.2651
	124.8	0.3758
	149.5	0.4824
	179.1	0.5817
	214.5	0.677
	257.0	0.7726
	307.9	0.8723
	368.9	0.9785
	442.0	1.093
	529.6	1.218
	634.5	1.353
	760.2	1.5
	910.7	1.66
	1091.0	1.832
	1307.0	2.019
	1566.0	2.219
	1876.0	2.434
	2248.0	2.664
	2693.0	2.908
	3227.0	3.167
	3866.0	3.441
	4632.0	3.729
	5549.0	4.03
	6648.0	4.344
	7965.0	4.669
	9543.0	5.004
	11430.0	5.348
	13700.0	5.699
	16410.0	6.054
	19660.0	6.412
	23560.0	6.769
	28220.0	7.124
	33810.0	7.473
	40510.0	7.813
	48540.0	8.14
	58150.0	8.452
	69670.0	8.744
	83470.0	9.012

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.9767
q = 25.31
mu = 3.215
epsilonL = 1.084e-06
Eth = 14.26

Fit range

E = 14.26 – 100000