{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Xe+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.9767, "q": 25.31, "mu": 3.215, "epsilonL": 1.084e-06, "Eth": 14.26}, "E_min": 14.26, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
14.26	0.0	
17.09	1.619e-06	
20.47	2.439e-05	
24.53	0.0001469	
29.39	0.0006102	
35.21	0.002069	
42.18	0.006142	
50.54	0.01646	
60.55	0.03994	
72.54	0.08654	
86.91	0.1633	
104.1	0.2651	
124.8	0.3758	
149.5	0.4824	
179.1	0.5817	
214.5	0.677	
257.0	0.7726	
307.9	0.8723	
368.9	0.9785	
442.0	1.093	
529.6	1.218	
634.5	1.353	
760.2	1.5	
910.7	1.66	
1091.0	1.832	
1307.0	2.019	
1566.0	2.219	
1876.0	2.434	
2248.0	2.664	
2693.0	2.908	
3227.0	3.167	
3866.0	3.441	
4632.0	3.729	
5549.0	4.03	
6648.0	4.344	
7965.0	4.669	
9543.0	5.004	
11430.0	5.348	
13700.0	5.699	
16410.0	6.054	
19660.0	6.412	
23560.0	6.769	
28220.0	7.124	
33810.0	7.473	
40510.0	7.813	
48540.0	8.14	
58150.0	8.452	
69670.0	8.744	
83470.0	9.012	
-----