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Plasma-Surface Interaction Data Set 408

Sputtering of Ar+ on Sn(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Sn(pc) at 300 K

angle = 0.0 deg E /eV P
11.980.0
14.410.0001984
17.320.001331
20.830.004734
25.040.01282
30.110.02926
36.20.05834
43.530.1028
52.330.1613
62.920.2286
75.650.2988
90.960.3683
109.40.4361
131.50.5031
158.10.5706
190.10.6401
228.60.7126
274.80.789
330.40.8699
397.30.9557
477.71.047
574.31.143
690.51.244
830.31.351
998.31.463
1200.01.579
1443.01.7
1735.01.825
2086.01.953
2508.02.083
3016.02.215
3626.02.348
4360.02.481
5242.02.612
6303.02.741
7578.02.867
9112.02.987
10960.03.102
13170.03.208
15840.03.305
19040.03.392
22900.03.466
27530.03.525
33100.03.57
39800.03.596
47850.03.605
57530.03.593
69170.03.562
83170.03.509

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 11.98 – 100000