{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0746, "q": 9.217, "mu": 2.187, "epsilonL": 5.982e-06, "Eth": 11.98}, "E_min": 11.98, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
11.98	0.0	
14.41	0.0001984	
17.32	0.001331	
20.83	0.004734	
25.04	0.01282	
30.11	0.02926	
36.2	0.05834	
43.53	0.1028	
52.33	0.1613	
62.92	0.2286	
75.65	0.2988	
90.96	0.3683	
109.4	0.4361	
131.5	0.5031	
158.1	0.5706	
190.1	0.6401	
228.6	0.7126	
274.8	0.789	
330.4	0.8699	
397.3	0.9557	
477.7	1.047	
574.3	1.143	
690.5	1.244	
830.3	1.351	
998.3	1.463	
1200.0	1.579	
1443.0	1.7	
1735.0	1.825	
2086.0	1.953	
2508.0	2.083	
3016.0	2.215	
3626.0	2.348	
4360.0	2.481	
5242.0	2.612	
6303.0	2.741	
7578.0	2.867	
9112.0	2.987	
10960.0	3.102	
13170.0	3.208	
15840.0	3.305	
19040.0	3.392	
22900.0	3.466	
27530.0	3.525	
33100.0	3.57	
39800.0	3.596	
47850.0	3.605	
57530.0	3.593	
69170.0	3.562	
83170.0	3.509	
-----