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Plasma-Surface Interaction Data Set 406

Sputtering of ⁴He⁺ on Sn(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ⁴He⁺ on Sn(pc) at 300 K

angle = 0.0 deg	E /eV	P
	29.61	0.0
	34.95	0.0002125
	41.26	0.00104
	48.7	0.002933
	57.48	0.006444
	67.85	0.01203
	80.08	0.01972
	94.52	0.02896
	111.6	0.03879
	131.7	0.0483
	155.4	0.05696
	183.5	0.06463
	216.6	0.0714
	255.6	0.07744
	301.7	0.08292
	356.1	0.08798
	420.4	0.09271
	496.2	0.09716
	585.7	0.1014
	691.3	0.1053
	816.0	0.1091
	963.2	0.1125
	1137.0	0.1157
	1342.0	0.1185
	1584.0	0.121
	1870.0	0.1231
	2207.0	0.1248
	2605.0	0.126
	3074.0	0.1267
	3629.0	0.1269
	4283.0	0.1264
	5056.0	0.1254
	5968.0	0.1239
	7044.0	0.1217
	8315.0	0.1189
	9814.0	0.1156
	11580.0	0.1117
	13670.0	0.1074
	16140.0	0.1027
	19050.0	0.09771
	22490.0	0.09243
	26540.0	0.08697
	31330.0	0.08142
	36980.0	0.07584
	43650.0	0.07031
	51520.0	0.06489
	60810.0	0.05963
	71780.0	0.05457
	84720.0	0.04974

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1102
q = 0.3244
mu = 1.852
epsilonL = 8.084e-05
Eth = 29.61

Fit range

E = 29.61 – 100000