{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1102, "q": 0.3244, "mu": 1.852, "epsilonL": 8.084e-05, "Eth": 29.61}, "E_min": 29.61, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
29.61	0.0	
34.95	0.0002125	
41.26	0.00104	
48.7	0.002933	
57.48	0.006444	
67.85	0.01203	
80.08	0.01972	
94.52	0.02896	
111.6	0.03879	
131.7	0.0483	
155.4	0.05696	
183.5	0.06463	
216.6	0.0714	
255.6	0.07744	
301.7	0.08292	
356.1	0.08798	
420.4	0.09271	
496.2	0.09716	
585.7	0.1014	
691.3	0.1053	
816.0	0.1091	
963.2	0.1125	
1137.0	0.1157	
1342.0	0.1185	
1584.0	0.121	
1870.0	0.1231	
2207.0	0.1248	
2605.0	0.126	
3074.0	0.1267	
3629.0	0.1269	
4283.0	0.1264	
5056.0	0.1254	
5968.0	0.1239	
7044.0	0.1217	
8315.0	0.1189	
9814.0	0.1156	
11580.0	0.1117	
13670.0	0.1074	
16140.0	0.1027	
19050.0	0.09771	
22490.0	0.09243	
26540.0	0.08697	
31330.0	0.08142	
36980.0	0.07584	
43650.0	0.07031	
51520.0	0.06489	
60810.0	0.05963	
71780.0	0.05457	
84720.0	0.04974	
-----