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Plasma-Surface Interaction Data Set 405

Sputtering of 3He+ on Sn(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Sn(pc) at 300 K

angle = 0.0 deg E /eV P
38.840.0
45.60.0002975
53.520.001164
62.830.002857
73.750.005721
86.570.01009
101.60.01617
119.30.02388
140.00.03283
164.40.04239
192.90.05193
226.50.06096
265.80.06921
312.00.07661
366.30.08322
429.90.08912
504.70.09444
592.40.09925
695.40.1036
816.30.1076
958.20.1112
1125.00.1145
1320.00.1174
1550.00.12
1819.00.1221
2135.00.1238
2507.00.1251
2942.00.1259
3454.00.1262
4054.00.1259
4759.00.1251
5586.00.1238
6557.00.1219
7697.00.1195
9035.00.1165
10610.00.1131
12450.00.1091
14610.00.1048
17150.00.1002
20130.00.09522
23630.00.09007
27740.00.08478
32570.00.07943
38230.00.07407
44870.00.06877
52670.00.06358
61830.00.05855
72580.00.05372
85190.00.0491

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 38.84 – 100000