{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1558, "q": 0.3227, "mu": 1.575, "epsilonL": 8.149e-05, "Eth": 38.84}, "E_min": 38.84, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
38.84	0.0	
45.6	0.0002975	
53.52	0.001164	
62.83	0.002857	
73.75	0.005721	
86.57	0.01009	
101.6	0.01617	
119.3	0.02388	
140.0	0.03283	
164.4	0.04239	
192.9	0.05193	
226.5	0.06096	
265.8	0.06921	
312.0	0.07661	
366.3	0.08322	
429.9	0.08912	
504.7	0.09444	
592.4	0.09925	
695.4	0.1036	
816.3	0.1076	
958.2	0.1112	
1125.0	0.1145	
1320.0	0.1174	
1550.0	0.12	
1819.0	0.1221	
2135.0	0.1238	
2507.0	0.1251	
2942.0	0.1259	
3454.0	0.1262	
4054.0	0.1259	
4759.0	0.1251	
5586.0	0.1238	
6557.0	0.1219	
7697.0	0.1195	
9035.0	0.1165	
10610.0	0.1131	
12450.0	0.1091	
14610.0	0.1048	
17150.0	0.1002	
20130.0	0.09522	
23630.0	0.09007	
27740.0	0.08478	
32570.0	0.07943	
38230.0	0.07407	
44870.0	0.06877	
52670.0	0.06358	
61830.0	0.05855	
72580.0	0.05372	
85190.0	0.0491	
-----