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Plasma-Surface Interaction Data Set 404

Sputtering of T+ on Sn(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Sn(pc) at 300 K

angle = 0.0 deg E /eV P
36.492.838e-28
42.880.0001459
50.40.0005796
59.240.001444
69.620.002937
81.830.005274
96.180.008617
113.00.01298
132.90.01816
156.20.02379
183.50.02941
215.70.03467
253.50.03936
298.00.04341
350.20.04686
411.70.04977
483.80.05224
568.70.05431
668.40.05606
785.60.05751
923.30.05868
1085.00.05959
1275.00.06024
1499.00.06063
1762.00.06075
2071.00.06059
2434.00.06016
2861.00.05946
3362.00.05847
3952.00.05722
4645.00.05571
5459.00.05396
6416.00.05199
7541.00.04984
8863.00.04752
10420.00.04509
12240.00.04256
14390.00.03997
16910.00.03737
19880.00.03477
23360.00.03221
27460.00.02972
32280.00.02731
37930.00.025
44590.00.0228
52400.00.02073
61590.00.01879
72390.00.01698
85080.00.0153

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 36.49 – 100000