{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2917, "q": 0.1556, "mu": 1.587, "epsilonL": 0.0001662, "Eth": 36.49}, "E_min": 36.49, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
36.49	2.838e-28	
42.88	0.0001459	
50.4	0.0005796	
59.24	0.001444	
69.62	0.002937	
81.83	0.005274	
96.18	0.008617	
113.0	0.01298	
132.9	0.01816	
156.2	0.02379	
183.5	0.02941	
215.7	0.03467	
253.5	0.03936	
298.0	0.04341	
350.2	0.04686	
411.7	0.04977	
483.8	0.05224	
568.7	0.05431	
668.4	0.05606	
785.6	0.05751	
923.3	0.05868	
1085.0	0.05959	
1275.0	0.06024	
1499.0	0.06063	
1762.0	0.06075	
2071.0	0.06059	
2434.0	0.06016	
2861.0	0.05946	
3362.0	0.05847	
3952.0	0.05722	
4645.0	0.05571	
5459.0	0.05396	
6416.0	0.05199	
7541.0	0.04984	
8863.0	0.04752	
10420.0	0.04509	
12240.0	0.04256	
14390.0	0.03997	
16910.0	0.03737	
19880.0	0.03477	
23360.0	0.03221	
27460.0	0.02972	
32280.0	0.02731	
37930.0	0.025	
44590.0	0.0228	
52400.0	0.02073	
61590.0	0.01879	
72390.0	0.01698	
85080.0	0.0153	
-----