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Plasma-Surface Interaction Data Set 403

Sputtering of D+ on Sn(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Sn(pc) at 300 K

angle = 0.0 deg E /eV P
53.883.238e-29
62.830.0001288
73.260.0005228
85.420.001294
99.610.002564
116.10.004399
135.40.006755
157.90.009456
184.10.01225
214.70.01491
250.30.01729
291.90.01933
340.30.02104
396.90.02246
462.70.02365
539.60.02465
629.10.02548
733.60.02618
855.40.02675
997.40.0272
1163.00.02754
1356.00.02778
1581.00.0279
1844.00.02791
2150.00.0278
2507.00.02758
2923.00.02725
3408.00.0268
3974.00.02624
4633.00.02557
5403.00.02481
6300.00.02395
7345.00.02302
8565.00.02201
9987.00.02096
11640.00.01986
13580.00.01874
15830.00.0176
18460.00.01646
21530.00.01533
25100.00.01423
29270.00.01316
34120.00.01212
39790.00.01113
46400.00.01019
54100.00.009298
63080.00.008462
73550.00.007681
85760.00.006955

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 53.88 – 100000