{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1829, "q": 0.0715, "mu": 1.65, "epsilonL": 0.0001676, "Eth": 53.88}, "E_min": 53.88, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
53.88	3.238e-29	
62.83	0.0001288	
73.26	0.0005228	
85.42	0.001294	
99.61	0.002564	
116.1	0.004399	
135.4	0.006755	
157.9	0.009456	
184.1	0.01225	
214.7	0.01491	
250.3	0.01729	
291.9	0.01933	
340.3	0.02104	
396.9	0.02246	
462.7	0.02365	
539.6	0.02465	
629.1	0.02548	
733.6	0.02618	
855.4	0.02675	
997.4	0.0272	
1163.0	0.02754	
1356.0	0.02778	
1581.0	0.0279	
1844.0	0.02791	
2150.0	0.0278	
2507.0	0.02758	
2923.0	0.02725	
3408.0	0.0268	
3974.0	0.02624	
4633.0	0.02557	
5403.0	0.02481	
6300.0	0.02395	
7345.0	0.02302	
8565.0	0.02201	
9987.0	0.02096	
11640.0	0.01986	
13580.0	0.01874	
15830.0	0.0176	
18460.0	0.01646	
21530.0	0.01533	
25100.0	0.01423	
29270.0	0.01316	
34120.0	0.01212	
39790.0	0.01113	
46400.0	0.01019	
54100.0	0.009298	
63080.0	0.008462	
73550.0	0.007681	
85760.0	0.006955	
-----