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Plasma-Surface Interaction Data Set 402

Sputtering of H+ on Sn(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Sn(pc) at 300 K

angle = 0.0 deg E /eV P
104.16.465e-30
119.83.895e-05
137.80.0001582
158.50.0003942
182.40.0007956
209.80.001413
241.40.002282
277.70.003404
319.50.004725
367.50.00615
422.80.007564
486.40.008867
559.60.01
643.80.01094
740.70.0117
852.10.0123
980.30.01276
1128.00.0131
1297.00.01335
1493.00.01351
1717.00.0136
1976.00.01362
2273.00.01358
2615.00.01348
3008.00.01333
3461.00.01313
3981.00.01288
4581.00.01259
5270.00.01225
6062.00.01187
6975.00.01146
8024.00.01102
9231.00.01056
10620.00.01007
12220.00.009574
14060.00.009067
16170.00.008556
18600.00.008045
21400.00.00754
24620.00.007043
28330.00.006559
32590.00.006091
37490.00.005639
43130.00.005208
49620.00.004797
57090.00.004408
65670.00.004041
75560.00.003697
86920.00.003376

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 104.1 – 100000