{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Sn", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of H+ on Sn(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4702, "q": 0.0352, "mu": 1.667, "epsilonL": 0.000169, "Eth": 104.1}, "E_min": 104.1, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
104.1	6.465e-30	
119.8	3.895e-05	
137.8	0.0001582	
158.5	0.0003942	
182.4	0.0007956	
209.8	0.001413	
241.4	0.002282	
277.7	0.003404	
319.5	0.004725	
367.5	0.00615	
422.8	0.007564	
486.4	0.008867	
559.6	0.01	
643.8	0.01094	
740.7	0.0117	
852.1	0.0123	
980.3	0.01276	
1128.0	0.0131	
1297.0	0.01335	
1493.0	0.01351	
1717.0	0.0136	
1976.0	0.01362	
2273.0	0.01358	
2615.0	0.01348	
3008.0	0.01333	
3461.0	0.01313	
3981.0	0.01288	
4581.0	0.01259	
5270.0	0.01225	
6062.0	0.01187	
6975.0	0.01146	
8024.0	0.01102	
9231.0	0.01056	
10620.0	0.01007	
12220.0	0.009574	
14060.0	0.009067	
16170.0	0.008556	
18600.0	0.008045	
21400.0	0.00754	
24620.0	0.007043	
28330.0	0.006559	
32590.0	0.006091	
37490.0	0.005639	
43130.0	0.005208	
49620.0	0.004797	
57090.0	0.004408	
65670.0	0.004041	
75560.0	0.003697	
86920.0	0.003376	
-----