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Plasma-Surface Interaction Data Set 400

Sputtering of Kr+ on In(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on In(pc) at 300 K

angle = 0.0 deg E /eV P
13.420.0
16.10.0001802
19.310.001098
23.160.003687
27.790.00966
33.330.02189
39.980.04466
47.960.08319
57.540.1421
69.020.2228
82.790.3222
99.320.4339
119.10.5516
142.90.6715
171.40.7927
205.60.9162
246.71.044
295.91.177
355.01.318
425.81.468
510.81.629
612.71.801
735.01.985
881.72.183
1058.02.393
1269.02.617
1522.02.855
1826.03.107
2190.03.371
2627.03.649
3151.03.939
3780.04.239
4535.04.55
5440.04.869
6526.05.195
7828.05.526
9390.05.859
11260.06.194
13510.06.526
16210.06.853
19440.07.173
23320.07.482
27980.07.777
33560.08.054
40260.08.309
48290.08.54
57930.08.741
69490.08.909
83360.09.04

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 13.42 – 100000