{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "In", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on In(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0996, "q": 23.48, "mu": 2.067, "epsilonL": 2.163e-06, "Eth": 13.42}, "E_min": 13.42, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.42	0.0	
16.1	0.0001802	
19.31	0.001098	
23.16	0.003687	
27.79	0.00966	
33.33	0.02189	
39.98	0.04466	
47.96	0.08319	
57.54	0.1421	
69.02	0.2228	
82.79	0.3222	
99.32	0.4339	
119.1	0.5516	
142.9	0.6715	
171.4	0.7927	
205.6	0.9162	
246.7	1.044	
295.9	1.177	
355.0	1.318	
425.8	1.468	
510.8	1.629	
612.7	1.801	
735.0	1.985	
881.7	2.183	
1058.0	2.393	
1269.0	2.617	
1522.0	2.855	
1826.0	3.107	
2190.0	3.371	
2627.0	3.649	
3151.0	3.939	
3780.0	4.239	
4535.0	4.55	
5440.0	4.869	
6526.0	5.195	
7828.0	5.526	
9390.0	5.859	
11260.0	6.194	
13510.0	6.526	
16210.0	6.853	
19440.0	7.173	
23320.0	7.482	
27980.0	7.777	
33560.0	8.054	
40260.0	8.309	
48290.0	8.54	
57930.0	8.741	
69490.0	8.909	
83360.0	9.04	
-----