Return to search

Plasma-Surface Interaction Data Set 398

Sputtering of T+ on In(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on In(pc) at 300 K

angle = 0.0 deg E /eV P
34.350.0003536
40.560.001162
47.890.002556
56.550.004705
66.770.007749
78.840.01173
93.090.01656
109.90.02197
129.80.02763
153.30.03321
181.00.03846
213.70.04323
252.30.04747
297.90.0512
351.80.05446
415.40.0573
490.50.05976
579.10.06189
683.80.06371
807.40.06523
953.40.06645
1126.00.06737
1329.00.068
1570.00.06831
1853.00.0683
2188.00.06797
2584.00.06731
3051.00.06632
3603.00.065
4254.00.06337
5023.00.06145
5931.00.05926
7003.00.05683
8269.00.0542
9764.00.05141
11530.00.0485
13610.00.04552
16070.00.04251
18980.00.0395
22410.00.03653
26460.00.03364
31250.00.03084
36900.00.02816
43570.00.02562
51440.00.02323
60740.00.02099
71720.00.01891
84690.00.01698

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 29.09 – 100000