{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "In", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on In(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1745, "q": 0.1751, "mu": 1.349, "epsilonL": 0.0001705, "Eth": 29.09}, "E_min": 29.09, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.35	0.0003536	
40.56	0.001162	
47.89	0.002556	
56.55	0.004705	
66.77	0.007749	
78.84	0.01173	
93.09	0.01656	
109.9	0.02197	
129.8	0.02763	
153.3	0.03321	
181.0	0.03846	
213.7	0.04323	
252.3	0.04747	
297.9	0.0512	
351.8	0.05446	
415.4	0.0573	
490.5	0.05976	
579.1	0.06189	
683.8	0.06371	
807.4	0.06523	
953.4	0.06645	
1126.0	0.06737	
1329.0	0.068	
1570.0	0.06831	
1853.0	0.0683	
2188.0	0.06797	
2584.0	0.06731	
3051.0	0.06632	
3603.0	0.065	
4254.0	0.06337	
5023.0	0.06145	
5931.0	0.05926	
7003.0	0.05683	
8269.0	0.0542	
9764.0	0.05141	
11530.0	0.0485	
13610.0	0.04552	
16070.0	0.04251	
18980.0	0.0395	
22410.0	0.03653	
26460.0	0.03364	
31250.0	0.03084	
36900.0	0.02816	
43570.0	0.02562	
51440.0	0.02323	
60740.0	0.02099	
71720.0	0.01891	
84690.0	0.01698	
-----