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Plasma-Surface Interaction Data Set 397

Sputtering of D+ on In(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on In(pc) at 300 K

angle = 0.0 deg E /eV P
42.410.0
49.690.0002323
58.230.0008153
68.230.001853
79.940.003467
93.670.005737
109.80.008647
128.60.01206
150.70.01573
176.60.0194
206.90.02286
242.40.02598
284.00.02871
332.80.03106
390.00.03306
457.00.03477
535.40.03622
627.40.03745
735.10.03848
861.40.03932
1009.00.03998
1183.00.04047
1386.00.04078
1624.00.04092
1902.00.04088
2229.00.04066
2612.00.04026
3061.00.03968
3586.00.03892
4202.00.03799
4924.00.0369
5769.00.03566
6760.00.03429
7921.00.03281
9281.00.03123
10870.00.02959
12740.00.02789
14930.00.02617
17490.00.02445
20500.00.02274
24020.00.02107
28140.00.01944
32980.00.01786
38640.00.01636
45280.00.01493
53050.00.01359
62160.00.01233
72840.00.01115
85340.00.01006

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.41 – 100000