{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "In", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on In(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1803, "q": 0.1049, "mu": 1.453, "epsilonL": 0.000172, "Eth": 42.41}, "E_min": 42.41, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
42.41	0.0	
49.69	0.0002323	
58.23	0.0008153	
68.23	0.001853	
79.94	0.003467	
93.67	0.005737	
109.8	0.008647	
128.6	0.01206	
150.7	0.01573	
176.6	0.0194	
206.9	0.02286	
242.4	0.02598	
284.0	0.02871	
332.8	0.03106	
390.0	0.03306	
457.0	0.03477	
535.4	0.03622	
627.4	0.03745	
735.1	0.03848	
861.4	0.03932	
1009.0	0.03998	
1183.0	0.04047	
1386.0	0.04078	
1624.0	0.04092	
1902.0	0.04088	
2229.0	0.04066	
2612.0	0.04026	
3061.0	0.03968	
3586.0	0.03892	
4202.0	0.03799	
4924.0	0.0369	
5769.0	0.03566	
6760.0	0.03429	
7921.0	0.03281	
9281.0	0.03123	
10870.0	0.02959	
12740.0	0.02789	
14930.0	0.02617	
17490.0	0.02445	
20500.0	0.02274	
24020.0	0.02107	
28140.0	0.01944	
32980.0	0.01786	
38640.0	0.01636	
45280.0	0.01493	
53050.0	0.01359	
62160.0	0.01233	
72840.0	0.01115	
85340.0	0.01006	
-----