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Plasma-Surface Interaction Data Set 396

Sputtering of H+ on In(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on In(pc) at 300 K

angle = 0.0 deg E /eV P
77.610.0
89.823.044e-05
104.00.0001362
120.30.0003628
139.20.0007731
161.20.001439
186.50.002418
215.90.003723
249.80.005294
289.20.007003
334.70.008693
387.30.01024
448.30.01156
518.80.01265
600.50.01352
695.00.01421
804.30.01474
930.90.01515
1077.00.01545
1247.00.01567
1443.00.0158
1670.00.01586
1933.00.01586
2237.00.01578
2589.00.01565
2997.00.01544
3469.00.01518
4014.00.01486
4646.00.01449
5377.00.01406
6224.00.01359
7203.00.01308
8337.00.01253
9648.00.01196
11170.00.01136
12920.00.01075
14960.00.01014
17310.00.009518
20040.00.008905
23190.00.008302
26840.00.007713
31060.00.007143
35950.00.006594
41610.00.00607
48160.00.005573
55730.00.005102
64500.00.00466
74650.00.004247
86400.00.003861

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 77.61 – 100000