pwiDB

Plasma-Surface Interaction Data Set 395

Sputtering of Cd⁺ on Cd(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Cd⁺ on Cd(pc) at 300 K

angle = 0.0 deg	E /eV	P
	5.779	0.0
	7.053	6.775e-05
	8.607	0.0005078
	10.5	0.001985
	12.82	0.005936
	15.64	0.01526
	19.09	0.03523
	23.3	0.07428
	28.43	0.143
	34.7	0.2498
	42.35	0.3951
	51.68	0.5692
	63.07	0.7591
	76.96	0.9559
	93.92	1.157
	114.6	1.366
	139.9	1.587
	170.7	1.823
	208.3	2.081
	254.2	2.362
	310.3	2.672
	378.6	3.013
	462.1	3.388
	563.9	3.8
	688.2	4.25
	839.8	4.743
	1025.0	5.278
	1251.0	5.859
	1526.0	6.485
	1863.0	7.159
	2273.0	7.879
	2774.0	8.646
	3386.0	9.459
	4132.0	10.32
	5042.0	11.21
	6153.0	12.15
	7509.0	13.12
	9164.0	14.11
	11180.0	15.13
	13650.0	16.16
	16660.0	17.19
	20330.0	18.22
	24810.0	19.24
	30270.0	20.23
	36940.0	21.19
	45080.0	22.1
	55020.0	22.94
	67150.0	23.72
	81940.0	24.4

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1861
q = 66.4
mu = 2.278
epsilonL = 1.374e-06
Eth = 5.779

Fit range

E = 5.779 – 100000