{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cd", "surface_phase": "pc", "species": {"text": "Cd+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Cd+ on Cd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1861, "q": 66.4, "mu": 2.278, "epsilonL": 1.374e-06, "Eth": 5.779}, "E_min": 5.779, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
5.779	0.0	
7.053	6.775e-05	
8.607	0.0005078	
10.5	0.001985	
12.82	0.005936	
15.64	0.01526	
19.09	0.03523	
23.3	0.07428	
28.43	0.143	
34.7	0.2498	
42.35	0.3951	
51.68	0.5692	
63.07	0.7591	
76.96	0.9559	
93.92	1.157	
114.6	1.366	
139.9	1.587	
170.7	1.823	
208.3	2.081	
254.2	2.362	
310.3	2.672	
378.6	3.013	
462.1	3.388	
563.9	3.8	
688.2	4.25	
839.8	4.743	
1025.0	5.278	
1251.0	5.859	
1526.0	6.485	
1863.0	7.159	
2273.0	7.879	
2774.0	8.646	
3386.0	9.459	
4132.0	10.32	
5042.0	11.21	
6153.0	12.15	
7509.0	13.12	
9164.0	14.11	
11180.0	15.13	
13650.0	16.16	
16660.0	17.19	
20330.0	18.22	
24810.0	19.24	
30270.0	20.23	
36940.0	21.19	
45080.0	22.1	
55020.0	22.94	
67150.0	23.72	
81940.0	24.4	
-----