pwiDB

Plasma-Surface Interaction Data Set 394

Sputtering of Kr⁺ on Cd(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Cd(pc) at 300 K

angle = 0.0 deg	E /eV	P
	6.157	0.0
	7.504	4.848e-05
	9.146	0.0004823
	11.15	0.002257
	13.59	0.007728
	16.56	0.02205
	20.18	0.05479
	24.6	0.1194
	29.98	0.2262
	36.54	0.3717
	44.53	0.5378
	54.28	0.7071
	66.15	0.8731
	80.63	1.038
	98.27	1.207
	119.8	1.385
	146.0	1.577
	177.9	1.786
	216.8	2.015
	264.3	2.267
	322.1	2.544
	392.6	2.846
	478.5	3.177
	583.2	3.538
	710.8	3.929
	866.3	4.352
	1056.0	4.808
	1287.0	5.296
	1568.0	5.817
	1912.0	6.37
	2330.0	6.954
	2840.0	7.568
	3461.0	8.209
	4218.0	8.875
	5141.0	9.562
	6266.0	10.27
	7637.0	10.98
	9307.0	11.71
	11340.0	12.43
	13830.0	13.15
	16850.0	13.86
	20540.0	14.54
	25030.0	15.2
	30510.0	15.82
	37180.0	16.39
	45320.0	16.91
	55230.0	17.36
	67320.0	17.74
	82050.0	18.02

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1779
q = 46.81
mu = 2.636
epsilonL = 2.197e-06
Eth = 6.157

Fit range

E = 6.157 – 100000