{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cd", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Cd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1779, "q": 46.81, "mu": 2.636, "epsilonL": 2.197e-06, "Eth": 6.157}, "E_min": 6.157, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
6.157	0.0	
7.504	4.848e-05	
9.146	0.0004823	
11.15	0.002257	
13.59	0.007728	
16.56	0.02205	
20.18	0.05479	
24.6	0.1194	
29.98	0.2262	
36.54	0.3717	
44.53	0.5378	
54.28	0.7071	
66.15	0.8731	
80.63	1.038	
98.27	1.207	
119.8	1.385	
146.0	1.577	
177.9	1.786	
216.8	2.015	
264.3	2.267	
322.1	2.544	
392.6	2.846	
478.5	3.177	
583.2	3.538	
710.8	3.929	
866.3	4.352	
1056.0	4.808	
1287.0	5.296	
1568.0	5.817	
1912.0	6.37	
2330.0	6.954	
2840.0	7.568	
3461.0	8.209	
4218.0	8.875	
5141.0	9.562	
6266.0	10.27	
7637.0	10.98	
9307.0	11.71	
11340.0	12.43	
13830.0	13.15	
16850.0	13.86	
20540.0	14.54	
25030.0	15.2	
30510.0	15.82	
37180.0	16.39	
45320.0	16.91	
55230.0	17.36	
67320.0	17.74	
82050.0	18.02	
-----