pwiDB

Plasma-Surface Interaction Data Set 393

Sputtering of Ar⁺ on Cd(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Cd(pc) at 300 K

angle = 0.0 deg	E /eV	P
	5.415	8.863e-39
	6.617	0.0001673
	8.085	0.001256
	9.88	0.004896
	12.07	0.01447
	14.75	0.03619
	18.03	0.07935
	22.03	0.1537
	26.92	0.2629
	32.9	0.3998
	40.2	0.5503
	49.13	0.7032
	60.04	0.8546
	73.36	1.006
	89.65	1.16
	109.6	1.322
	133.9	1.493
	163.6	1.678
	199.9	1.876
	244.3	2.09
	298.5	2.321
	364.8	2.57
	445.8	2.836
	544.7	3.12
	665.7	3.422
	813.4	3.742
	994.0	4.078
	1215.0	4.429
	1484.0	4.794
	1814.0	5.17
	2217.0	5.556
	2709.0	5.949
	3310.0	6.346
	4045.0	6.744
	4943.0	7.138
	6040.0	7.525
	7381.0	7.901
	9019.0	8.26
	11020.0	8.598
	13470.0	8.91
	16460.0	9.19
	20110.0	9.432
	24580.0	9.631
	30030.0	9.781
	36700.0	9.877
	44850.0	9.913
	54800.0	9.886
	66970.0	9.792
	81830.0	9.631

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1235
q = 25.35
mu = 2.279
epsilonL = 6.201e-06
Eth = 5.415

Fit range

E = 5.415 – 100000