{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Cd", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Cd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1235, "q": 25.35, "mu": 2.279, "epsilonL": 6.201e-06, "Eth": 5.415}, "E_min": 5.415, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
5.415	8.863e-39	
6.617	0.0001673	
8.085	0.001256	
9.88	0.004896	
12.07	0.01447	
14.75	0.03619	
18.03	0.07935	
22.03	0.1537	
26.92	0.2629	
32.9	0.3998	
40.2	0.5503	
49.13	0.7032	
60.04	0.8546	
73.36	1.006	
89.65	1.16	
109.6	1.322	
133.9	1.493	
163.6	1.678	
199.9	1.876	
244.3	2.09	
298.5	2.321	
364.8	2.57	
445.8	2.836	
544.7	3.12	
665.7	3.422	
813.4	3.742	
994.0	4.078	
1215.0	4.429	
1484.0	4.794	
1814.0	5.17	
2217.0	5.556	
2709.0	5.949	
3310.0	6.346	
4045.0	6.744	
4943.0	7.138	
6040.0	7.525	
7381.0	7.901	
9019.0	8.26	
11020.0	8.598	
13470.0	8.91	
16460.0	9.19	
20110.0	9.432	
24580.0	9.631	
30030.0	9.781	
36700.0	9.877	
44850.0	9.913	
54800.0	9.886	
66970.0	9.792	
81830.0	9.631	
-----