pwiDB

Plasma-Surface Interaction Data Set 390

Sputtering of Kr⁺ on Ag(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Ag(pc) at 300 K

angle = 0.0 deg	E /eV	P
	16.21	7.726e-42
	19.37	7.853e-05
	23.14	0.0006537
	27.65	0.00268
	33.05	0.008202
	39.49	0.02123
	47.19	0.04874
	56.39	0.1008
	67.38	0.1879
	80.52	0.3142
	96.21	0.4723
	115.0	0.6466
	137.4	0.8231
	164.2	0.9953
	196.2	1.164
	234.4	1.331
	280.1	1.503
	334.7	1.682
	400.0	1.871
	478.0	2.072
	571.2	2.286
	682.5	2.516
	815.6	2.762
	974.6	3.025
	1165.0	3.304
	1392.0	3.601
	1663.0	3.914
	1987.0	4.245
	2375.0	4.591
	2838.0	4.953
	3391.0	5.33
	4052.0	5.72
	4842.0	6.121
	5786.0	6.532
	6914.0	6.95
	8262.0	7.373
	9872.0	7.799
	11800.0	8.224
	14100.0	8.646
	16850.0	9.06
	20130.0	9.463
	24050.0	9.852
	28740.0	10.22
	34350.0	10.57
	41040.0	10.89
	49040.0	11.17
	58610.0	11.42
	70030.0	11.63
	83680.0	11.79

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1801
q = 30.55
mu = 2.471
epsilonL = 2.212e-06
Eth = 16.21

Fit range

E = 16.21 – 100000