{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of Kr+ on Ag(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1801, "q": 30.55, "mu": 2.471, "epsilonL": 2.212e-06, "Eth": 16.21}, "E_min": 16.21, "E_max": 100000} angle = 0.0 deg E /eV P 16.21 7.726e-42 19.37 7.853e-05 23.14 0.0006537 27.65 0.00268 33.05 0.008202 39.49 0.02123 47.19 0.04874 56.39 0.1008 67.38 0.1879 80.52 0.3142 96.21 0.4723 115.0 0.6466 137.4 0.8231 164.2 0.9953 196.2 1.164 234.4 1.331 280.1 1.503 334.7 1.682 400.0 1.871 478.0 2.072 571.2 2.286 682.5 2.516 815.6 2.762 974.6 3.025 1165.0 3.304 1392.0 3.601 1663.0 3.914 1987.0 4.245 2375.0 4.591 2838.0 4.953 3391.0 5.33 4052.0 5.72 4842.0 6.121 5786.0 6.532 6914.0 6.95 8262.0 7.373 9872.0 7.799 11800.0 8.224 14100.0 8.646 16850.0 9.06 20130.0 9.463 24050.0 9.852 28740.0 10.22 34350.0 10.57 41040.0 10.89 49040.0 11.17 58610.0 11.42 70030.0 11.63 83680.0 11.79 -----