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Plasma-Surface Interaction Data Set 389

Sputtering of Ar+ on Ag(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Ag(pc) at 300 K

angle = 0.0 deg E /eV P
13.910.0
16.670.0003182
19.990.001755
23.960.005538
28.720.01385
34.420.03032
41.260.06038
49.460.1111
59.290.1896
71.070.3004
85.190.4421
102.10.6071
122.40.785
146.70.9672
175.91.149
210.81.329
252.71.509
302.91.69
363.11.876
435.32.067
521.82.266
625.42.473
749.72.688
898.72.912
1077.03.145
1291.03.387
1548.03.635
1855.03.89
2224.04.151
2666.04.415
3196.04.682
3831.04.949
4592.05.214
5504.05.476
6598.05.732
7908.05.979
9480.06.216
11360.06.438
13620.06.644
16330.06.83
19570.06.993
23460.07.13
28120.07.238
33710.07.313
40410.07.354
48440.07.357
58060.07.321
69600.07.244
83420.07.125

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 13.91 – 100000