{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ar+ on Ag(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.165, "q": 18.82, "mu": 1.942, "epsilonL": 6.292e-06, "Eth": 13.91}, "E_min": 13.91, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.91	0.0	
16.67	0.0003182	
19.99	0.001755	
23.96	0.005538	
28.72	0.01385	
34.42	0.03032	
41.26	0.06038	
49.46	0.1111	
59.29	0.1896	
71.07	0.3004	
85.19	0.4421	
102.1	0.6071	
122.4	0.785	
146.7	0.9672	
175.9	1.149	
210.8	1.329	
252.7	1.509	
302.9	1.69	
363.1	1.876	
435.3	2.067	
521.8	2.266	
625.4	2.473	
749.7	2.688	
898.7	2.912	
1077.0	3.145	
1291.0	3.387	
1548.0	3.635	
1855.0	3.89	
2224.0	4.151	
2666.0	4.415	
3196.0	4.682	
3831.0	4.949	
4592.0	5.214	
5504.0	5.476	
6598.0	5.732	
7908.0	5.979	
9480.0	6.216	
11360.0	6.438	
13620.0	6.644	
16330.0	6.83	
19570.0	6.993	
23460.0	7.13	
28120.0	7.238	
33710.0	7.313	
40410.0	7.354	
48440.0	7.357	
58060.0	7.321	
69600.0	7.244	
83420.0	7.125	
-----