pwiDB

Plasma-Surface Interaction Data Set 388

Sputtering of Ne⁺ on Ag(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Ag(pc) at 300 K

angle = 0.0 deg	E /eV	P
	11.88	0.0
	14.29	8.607e-05
	17.18	0.0008899
	20.66	0.00417
	24.85	0.01384
	29.88	0.03655
	35.94	0.07887
	43.22	0.1401
	51.97	0.2095
	62.5	0.2762
	75.16	0.336
	90.38	0.3902
	108.7	0.4417
	130.7	0.4927
	157.2	0.5448
	189.0	0.5989
	227.3	0.6557
	273.3	0.7153
	328.7	0.7779
	395.3	0.8436
	475.3	0.912
	571.6	0.9832
	687.4	1.057
	826.6	1.132
	994.1	1.21
	1195.0	1.288
	1438.0	1.368
	1729.0	1.447
	2079.0	1.527
	2500.0	1.605
	3006.0	1.681
	3615.0	1.754
	4347.0	1.825
	5228.0	1.891
	6287.0	1.952
	7560.0	2.006
	9092.0	2.054
	10930.0	2.094
	13150.0	2.124
	15810.0	2.145
	19010.0	2.155
	22860.0	2.154
	27500.0	2.14
	33070.0	2.114
	39760.0	2.075
	47820.0	2.024
	57500.0	1.962
	69150.0	1.889
	83160.0	1.806

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0995
q = 5.512
mu = 2.731
epsilonL = 1.387e-05
Eth = 11.88

Fit range

E = 11.88 – 100000