{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ne+ on Ag(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0995, "q": 5.512, "mu": 2.731, "epsilonL": 1.387e-05, "Eth": 11.88}, "E_min": 11.88, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
11.88	0.0	
14.29	8.607e-05	
17.18	0.0008899	
20.66	0.00417	
24.85	0.01384	
29.88	0.03655	
35.94	0.07887	
43.22	0.1401	
51.97	0.2095	
62.5	0.2762	
75.16	0.336	
90.38	0.3902	
108.7	0.4417	
130.7	0.4927	
157.2	0.5448	
189.0	0.5989	
227.3	0.6557	
273.3	0.7153	
328.7	0.7779	
395.3	0.8436	
475.3	0.912	
571.6	0.9832	
687.4	1.057	
826.6	1.132	
994.1	1.21	
1195.0	1.288	
1438.0	1.368	
1729.0	1.447	
2079.0	1.527	
2500.0	1.605	
3006.0	1.681	
3615.0	1.754	
4347.0	1.825	
5228.0	1.891	
6287.0	1.952	
7560.0	2.006	
9092.0	2.054	
10930.0	2.094	
13150.0	2.124	
15810.0	2.145	
19010.0	2.155	
22860.0	2.154	
27500.0	2.14	
33070.0	2.114	
39760.0	2.075	
47820.0	2.024	
57500.0	1.962	
69150.0	1.889	
83160.0	1.806	
-----