pwiDB

Plasma-Surface Interaction Data Set 387

Sputtering of O⁺ on Ag(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O⁺ on Ag(pc) at 300 K

angle = 0.0 deg	E /eV	P
	13.45	3.883e-34
	16.13	0.0003882
	19.35	0.002229
	23.21	0.007132
	27.84	0.01768
	33.4	0.03727
	40.06	0.0691
	48.06	0.1141
	57.64	0.1699
	69.14	0.2312
	82.94	0.2933
	99.49	0.3533
	119.3	0.4107
	143.1	0.466
	171.7	0.5203
	206.0	0.5744
	247.1	0.6291
	296.4	0.685
	355.5	0.7423
	426.4	0.8012
	511.5	0.8616
	613.5	0.9235
	735.9	0.9865
	882.8	1.051
	1059.0	1.115
	1270.0	1.18
	1524.0	1.244
	1828.0	1.308
	2192.0	1.37
	2630.0	1.431
	3154.0	1.488
	3783.0	1.543
	4538.0	1.594
	5444.0	1.64
	6530.0	1.68
	7833.0	1.714
	9396.0	1.742
	11270.0	1.761
	13520.0	1.773
	16220.0	1.775
	19450.0	1.768
	23330.0	1.751
	27990.0	1.723
	33570.0	1.686
	40270.0	1.64
	48300.0	1.584
	57940.0	1.52
	69500.0	1.449
	83370.0	1.372

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0839
q = 4.539
mu = 2.001
epsilonL = 1.826e-05
Eth = 13.45

Fit range

E = 13.45 – 100000