{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of O+ on Ag(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0839, "q": 4.539, "mu": 2.001, "epsilonL": 1.826e-05, "Eth": 13.45}, "E_min": 13.45, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.45	3.883e-34	
16.13	0.0003882	
19.35	0.002229	
23.21	0.007132	
27.84	0.01768	
33.4	0.03727	
40.06	0.0691	
48.06	0.1141	
57.64	0.1699	
69.14	0.2312	
82.94	0.2933	
99.49	0.3533	
119.3	0.4107	
143.1	0.466	
171.7	0.5203	
206.0	0.5744	
247.1	0.6291	
296.4	0.685	
355.5	0.7423	
426.4	0.8012	
511.5	0.8616	
613.5	0.9235	
735.9	0.9865	
882.8	1.051	
1059.0	1.115	
1270.0	1.18	
1524.0	1.244	
1828.0	1.308	
2192.0	1.37	
2630.0	1.431	
3154.0	1.488	
3783.0	1.543	
4538.0	1.594	
5444.0	1.64	
6530.0	1.68	
7833.0	1.714	
9396.0	1.742	
11270.0	1.761	
13520.0	1.773	
16220.0	1.775	
19450.0	1.768	
23330.0	1.751	
27990.0	1.723	
33570.0	1.686	
40270.0	1.64	
48300.0	1.584	
57940.0	1.52	
69500.0	1.449	
83370.0	1.372	
-----