pwiDB

Plasma-Surface Interaction Data Set 386

Sputtering of N⁺ on Ag(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Ag(pc) at 300 K

angle = 0.0 deg	E /eV	P
	13.04	0.0
	15.66	0.0001885
	18.79	0.001338
	22.55	0.004908
	27.07	0.01351
	32.49	0.03092
	39.0	0.06075
	46.81	0.1037
	56.18	0.1556
	67.44	0.2101
	80.94	0.2624
	97.15	0.3109
	116.6	0.3561
	140.0	0.3994
	168.0	0.442
	201.6	0.4846
	242.0	0.5281
	290.5	0.5726
	348.6	0.6184
	418.5	0.6655
	502.3	0.7138
	602.9	0.7631
	723.6	0.8133
	868.5	0.864
	1042.0	0.9149
	1251.0	0.9656
	1502.0	1.016
	1803.0	1.065
	2164.0	1.113
	2597.0	1.159
	3117.0	1.202
	3741.0	1.243
	4490.0	1.28
	5390.0	1.312
	6469.0	1.34
	7764.0	1.363
	9319.0	1.379
	11190.0	1.389
	13430.0	1.392
	16110.0	1.388
	19340.0	1.375
	23220.0	1.355
	27860.0	1.327
	33450.0	1.291
	40140.0	1.249
	48180.0	1.199
	57830.0	1.144
	69410.0	1.084
	83310.0	1.021

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.102
q = 3.56
mu = 2.264
epsilonL = 2.143e-05
Eth = 13.04

Fit range

E = 13.04 – 100000