{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "N+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of N+ on Ag(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.102, "q": 3.56, "mu": 2.264, "epsilonL": 2.143e-05, "Eth": 13.04}, "E_min": 13.04, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
13.04	0.0	
15.66	0.0001885	
18.79	0.001338	
22.55	0.004908	
27.07	0.01351	
32.49	0.03092	
39.0	0.06075	
46.81	0.1037	
56.18	0.1556	
67.44	0.2101	
80.94	0.2624	
97.15	0.3109	
116.6	0.3561	
140.0	0.3994	
168.0	0.442	
201.6	0.4846	
242.0	0.5281	
290.5	0.5726	
348.6	0.6184	
418.5	0.6655	
502.3	0.7138	
602.9	0.7631	
723.6	0.8133	
868.5	0.864	
1042.0	0.9149	
1251.0	0.9656	
1502.0	1.016	
1803.0	1.065	
2164.0	1.113	
2597.0	1.159	
3117.0	1.202	
3741.0	1.243	
4490.0	1.28	
5390.0	1.312	
6469.0	1.34	
7764.0	1.363	
9319.0	1.379	
11190.0	1.389	
13430.0	1.392	
16110.0	1.388	
19340.0	1.375	
23220.0	1.355	
27860.0	1.327	
33450.0	1.291	
40140.0	1.249	
48180.0	1.199	
57830.0	1.144	
69410.0	1.084	
83310.0	1.021	
-----