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Plasma-Surface Interaction Data Set 385

Sputtering of ⁴He⁺ on Ag(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ⁴He⁺ on Ag(pc) at 300 K

angle = 0.0 deg	E /eV	P
	26.45	9.851e-34
	31.3	0.0003003
	37.03	0.001625
	43.8	0.004889
	51.82	0.01127
	61.31	0.02177
	72.53	0.03646
	85.81	0.054
	101.5	0.07229
	120.1	0.08951
	142.1	0.1048
	168.1	0.1181
	198.9	0.1298
	235.3	0.1402
	278.4	0.1498
	329.3	0.1586
	389.6	0.1669
	461.0	0.1748
	545.3	0.1823
	645.2	0.1894
	763.3	0.1961
	903.0	0.2023
	1068.0	0.208
	1264.0	0.2131
	1495.0	0.2175
	1769.0	0.2213
	2093.0	0.2242
	2476.0	0.2262
	2929.0	0.2273
	3466.0	0.2274
	4100.0	0.2265
	4851.0	0.2244
	5739.0	0.2213
	6789.0	0.2171
	8032.0	0.2118
	9503.0	0.2055
	11240.0	0.1983
	13300.0	0.1902
	15740.0	0.1815
	18620.0	0.1722
	22020.0	0.1624
	26060.0	0.1525
	30830.0	0.1423
	36470.0	0.1322
	43150.0	0.1222
	51050.0	0.1125
	60390.0	0.103
	71450.0	0.09401
	84530.0	0.08545

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1136
q = 0.5817
mu = 1.972
epsilonL = 8.731e-05
Eth = 26.45

Fit range

E = 26.45 – 100000