{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Ag(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1136, "q": 0.5817, "mu": 1.972, "epsilonL": 8.731e-05, "Eth": 26.45}, "E_min": 26.45, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
26.45	9.851e-34	
31.3	0.0003003	
37.03	0.001625	
43.8	0.004889	
51.82	0.01127	
61.31	0.02177	
72.53	0.03646	
85.81	0.054	
101.5	0.07229	
120.1	0.08951	
142.1	0.1048	
168.1	0.1181	
198.9	0.1298	
235.3	0.1402	
278.4	0.1498	
329.3	0.1586	
389.6	0.1669	
461.0	0.1748	
545.3	0.1823	
645.2	0.1894	
763.3	0.1961	
903.0	0.2023	
1068.0	0.208	
1264.0	0.2131	
1495.0	0.2175	
1769.0	0.2213	
2093.0	0.2242	
2476.0	0.2262	
2929.0	0.2273	
3466.0	0.2274	
4100.0	0.2265	
4851.0	0.2244	
5739.0	0.2213	
6789.0	0.2171	
8032.0	0.2118	
9503.0	0.2055	
11240.0	0.1983	
13300.0	0.1902	
15740.0	0.1815	
18620.0	0.1722	
22020.0	0.1624	
26060.0	0.1525	
30830.0	0.1423	
36470.0	0.1322	
43150.0	0.1222	
51050.0	0.1125	
60390.0	0.103	
71450.0	0.09401	
84530.0	0.08545	
-----