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Plasma-Surface Interaction Data Set 384

Sputtering of ³He⁺ on Ag(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ³He⁺ on Ag(pc) at 300 K

angle = 0.0 deg	E /eV	P
	34.15	0.0
	40.19	0.0003831
	47.3	0.001647
	55.67	0.004282
	65.52	0.008904
	77.11	0.01605
	90.75	0.02592
	106.8	0.03809
	125.7	0.05161
	147.9	0.06534
	174.1	0.07837
	204.9	0.09022
	241.2	0.1008
	283.8	0.1101
	334.1	0.1184
	393.2	0.1259
	462.7	0.1327
	544.6	0.139
	641.0	0.1448
	754.4	0.1501
	887.8	0.155
	1045.0	0.1595
	1230.0	0.1634
	1447.0	0.1669
	1703.0	0.1698
	2005.0	0.1721
	2359.0	0.1738
	2777.0	0.1748
	3268.0	0.1751
	3846.0	0.1747
	4527.0	0.1734
	5328.0	0.1714
	6270.0	0.1686
	7380.0	0.165
	8685.0	0.1606
	10220.0	0.1556
	12030.0	0.1499
	14160.0	0.1437
	16660.0	0.137
	19610.0	0.1299
	23080.0	0.1225
	27170.0	0.115
	31970.0	0.1075
	37630.0	0.09995
	44290.0	0.09253
	52120.0	0.08529
	61340.0	0.07831
	72190.0	0.07162
	84970.0	0.06527

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1344
q = 0.4479
mu = 1.692
epsilonL = 8.808e-05
Eth = 34.15

Fit range

E = 34.15 – 100000