{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Ag(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1344, "q": 0.4479, "mu": 1.692, "epsilonL": 8.808e-05, "Eth": 34.15}, "E_min": 34.15, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.15	0.0	
40.19	0.0003831	
47.3	0.001647	
55.67	0.004282	
65.52	0.008904	
77.11	0.01605	
90.75	0.02592	
106.8	0.03809	
125.7	0.05161	
147.9	0.06534	
174.1	0.07837	
204.9	0.09022	
241.2	0.1008	
283.8	0.1101	
334.1	0.1184	
393.2	0.1259	
462.7	0.1327	
544.6	0.139	
641.0	0.1448	
754.4	0.1501	
887.8	0.155	
1045.0	0.1595	
1230.0	0.1634	
1447.0	0.1669	
1703.0	0.1698	
2005.0	0.1721	
2359.0	0.1738	
2777.0	0.1748	
3268.0	0.1751	
3846.0	0.1747	
4527.0	0.1734	
5328.0	0.1714	
6270.0	0.1686	
7380.0	0.165	
8685.0	0.1606	
10220.0	0.1556	
12030.0	0.1499	
14160.0	0.1437	
16660.0	0.137	
19610.0	0.1299	
23080.0	0.1225	
27170.0	0.115	
31970.0	0.1075	
37630.0	0.09995	
44290.0	0.09253	
52120.0	0.08529	
61340.0	0.07831	
72190.0	0.07162	
84970.0	0.06527	
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