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Plasma-Surface Interaction Data Set 382

Sputtering of D+ on Ag(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Ag(pc) at 300 K

angle = 0.0 deg E /eV P
48.180.0
56.310.0003439
65.80.001503
76.90.003825
89.880.007548
105.00.01257
122.80.01836
143.50.02424
167.70.02964
195.90.03429
229.00.03817
267.60.04138
312.80.04405
365.50.0463
427.20.04822
499.20.04987
583.50.05129
681.90.05249
796.90.0535
931.30.05431
1088.00.05492
1272.00.05533
1487.00.05552
1737.00.05549
2030.00.05524
2373.00.05475
2773.00.05403
3241.00.05307
3788.00.0519
4427.00.05051
5173.00.04892
6046.00.04715
7066.00.04523
8258.00.04317
9650.00.04102
11280.00.03878
13180.00.03651
15400.00.03421
18000.00.03192
21040.00.02966
24590.00.02746
28740.00.02532
33580.00.02327
39250.00.02131
45870.00.01945
53610.00.01771
62650.00.01607
73220.00.01455
85570.00.01314

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 48.18 – 100000